| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface mounting apparatus having a conveyance means which can cope with a heavy substrate while shortening the conveyance tact. <P>SOLUTION: The surface mounting apparatus 10 comprises a mounting means for mounting a component on a substrate P, a substrate conveyance way L provided on a base mount, and a substrate conveying device 100 for conveying the substrate P along the substrate conveyance way L and stopping the substrate P. It further comprises a substrate table 140 having a support surface for supporting the substrate conveyance device 100 from below the conveyance object substrate and having a function for holding the supported substrate in the conveyable state, a robot body 110 constituted by arranging a stator section with permanent magnets arranged in one axial direction on the base mount 11 along the substrate conveyance way L, and a movable member having a coil 180 surrounding the stator section 120 and constituting a linear motor single shaft robot RB together with the robot body 110 and causing linear movement of the substrate table 140 along the stator section of the robot body 110. <P>COPYRIGHT: (C)2009,JPO&INPIT |
