| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential flow meter, having such a simple structure as to lower the cost of production, which can highly accurately measure flow rates with an error E of not more than (1%SP) over a wide flow rate range of 100% to 1% in real time and in an in-line state. SOLUTION: The differential flow meter that measures a flow rate range of 100% to 10% of the maximum flow rate and a differential flow meter that measures a flow rate range of 10% to 1% of the maximum flow rate are combined. Fluid to be measured is selectively supplied to either of the differential flow meters through a switching valve in accordance with the flow rate ranges. This makes it possible to highly accurately measure flow rates over a wide flow rate range. COPYRIGHT: (C)2009,JPO&INPIT
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