| 摘要 |
PROBLEM TO BE SOLVED: To rapidly and accurately set an optimum retardation position in adjustment of retardation for an optical microscope having a differential interference observation function. SOLUTION: A Nomarski prism 117 is used to constitute a differential interference observation optical system. An operation part 3 acquires designation for moving the Nomarski prism 117. A DIC motor 118 moves the Nomarski prism 117 in a direction orthogonal to the optical axis of the optical system of the optical microscope in accordance with acquirement of designation by the operation part 3, to adjust the retardation in differential interference observation. A control part 2 counts duration of the designation acquired by the operation part 3 and also controls the DIC motor 118 to change the moving amount of the Nomarski prism 117 in accordance with the duration of the designation. COPYRIGHT: (C)2009,JPO&INPIT
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