发明名称 PICKUP DEVICE
摘要 A pickup device is provided to improve the accuracy of the plane dimension of the semiconductor device by reducing the number of pickers. A pickup device comprises the first picker fixing unit(120) extended from the first picker in a specific direction; the second picker transport unit(130) which is equipped in order to transfer in a specific direction along the first picker fixing unit; the plurality of picker unit transferring the second picker transport unit in a specific direction; the mobile tool which moves the interval between picker to the vertical direction of one-way when the second picker transport unit was transferred about the first picker fixing unit in a specific direction. The second picker transport unit fixes the second picker(131) absorbing the semiconductor device.
申请公布号 KR20080102746(A) 申请公布日期 2008.11.26
申请号 KR20070049585 申请日期 2007.05.22
申请人 SECRON CO., LTD. 发明人 LEE, JEONG WON;LEE, JAE DONG
分类号 H01L21/68;H01L21/67 主分类号 H01L21/68
代理机构 代理人
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