VACUUM EVAPORATION METHOD

摘要

The vacuum evaporation method provides a heating element between an evaporation source of a film-forming material and a substrate; and forms a phosphor layer of an alkali halide-based phosphor on a surface of said substrate by vacuum evaporation while causing the heating element to generate heat at a temperature t (° C.) satisfying Formula (1): <?in-line-formulae description="In-line Formulae" end="lead"?>T-200<=t<T (1)<?in-line-formulae description="In-line Formulae" end="tail"?> where T is a boiling point (° C.) of the film-forming material. This method is capable of using the film-forming material making up the phosphor layer with higher efficiency owing to a heating element while preventing the substrate and the phosphor layer from being adversely affected by heat from the heating element.