| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray single crystal orientation measuring device and a measuring method capable of performing highly accurately at high speed, orientation determination of all the three axes for examining the fitting state of a crystal axis with respect to the outer shape of a crystal. SOLUTION: This device has characteristics wherein a diffractometer method utilizing diffraction by a characteristic X-ray is used as a base, and a two-dimensional detector based on CCD operated in a TDI reading-out mode is adopted as an X-ray detector, and orientation determination of all the three axes is performed by capturing at two points, reflection of a specified (aimed) index by the two-dimensional detector. COPYRIGHT: (C)2009,JPO&INPIT
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