发明名称 SEMICONDUCTOR CHIP AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor chip and a manufacturing method thereof are provided to accurately set up the semiconductor chip and to improve reliability. A semiconductor chip(1) is formed with a bump(21) to correspond to a pad electrode(11). The pad electrode is formed to be coated with a nickel layer(14). The bump has an indium layer(22) and a metallic compound interlayer(23) formed between the indium layer and nickel layer. The metallic compound interlayer is formed by alloying a copper layer(20) having a copper atom of over 0.5 atom% to 5 atom% or less, based on the indium layer and the indium atom of the corresponding indium layer.
申请公布号 KR20080099139(A) 申请公布日期 2008.11.12
申请号 KR20080037027 申请日期 2008.04.22
申请人 SONY CORPORATION 发明人 OZAKI HIROSHI;WAKIYAMA SATORU
分类号 H01L23/29;H01L21/60 主分类号 H01L23/29
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