| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a related system for managing early warning of a semiconductor managing device for solving problems by conventional technology. <P>SOLUTION: In the early warning managing method of the semiconductor manufacturing device, process parameters of the respective semiconductor manufacturing devices are recorded, the respective semiconductor manufacturing devices perform manufacturing processes and record states of the processes as device parameters. Product quality after process termination is evaluated and a test parameter is recorded after the respective semiconductor manufacturing devices terminate the manufacturing processes. The process parameters corresponding to the respective semiconductor manufacturing devices, the device parameters and quality of a product are statistically analyzed. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
