| 发明名称 |
Sensor for monitoring material deposition |
| 摘要 |
A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.
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| 申请公布号 |
US7445675(B2) |
申请公布日期 |
2008.11.04 |
| 申请号 |
US20050047109 |
申请日期 |
2005.01.31 |
| 申请人 |
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS |
发明人 |
LIU CHANG |
| 分类号 |
H01L21/00;B05D7/24;C23C14/54;C23C16/52 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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