发明名称 Linear Motor, Stage Apparatus and Exposure Apparatus
摘要 A linear motor is equipped with a coil body ( 62 ), and a yoke ( 71 ) that supports a magnetism generating body ( 72 ) and that moves relative to the coil body ( 62 ). The yoke ( 71 ) has a first portion ( 73 ) that is formed from a magnetic material and disposed based on the saturation state of the magnetic field, which is generated by the magnetism generating body ( 72 ), in the yoke ( 71 ).
申请公布号 US2008265688(A1) 申请公布日期 2008.10.30
申请号 US20060795518 申请日期 2006.01.20
申请人 NIKON CORPORATION 发明人 NAKANO KATSUSHI;MORIMOTO SHIGERU;KAGEYAMA SHIGEKI
分类号 H02K41/00 主分类号 H02K41/00
代理机构 代理人
主权项
地址