| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer head of a laser transfer device capable of reducing an impact when a transfer plate touches a transfer object in a laser transfer device as represented by a laser repair device. SOLUTION: The transfer head includes: a transfer plate holder holding a transfer plate on the lower face and having a transfer window opened to expose the transfer plate toward the upper face; a transfer head frame body having a vacancy to house the transfer plate holder and giving a positional reference in a horizontal direction and in a vertical direction; and a holder support mechanism supporting the transfer plate holder housed in the vacancy for housing the transfer plate holder, allowing the holder to vertically move with respect to the transfer head frame body but inhibiting to horizontally move. The transfer plate holder includes a stepped structure having a lower part with a small diameter and a flange-like upper part with a large diameter. The upper face of the transfer head frame body to oppose to the lower face of the upper part with a large diameter has pressurized air jetting holes to blow pressurized air to the lower face of the upper part with a large diameter. The transfer plate holder is vertically movable within the vacancy for housing the holder while the holder is floating from the transfer head frame body. COPYRIGHT: (C)2009,JPO&INPIT
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