| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature information acquiring device at low cost for estimating the temperature of a heated body by real time with highly enough accuracy and to provide a heating system for controlling the temperature of the heated body with high accuracy according to the previously set temperature conditions. SOLUTION: In the device for estimating the temperature of a heated body, which is heated by a heating member, the heating member is arranged at a distance from the heated body as an object to be heated. The heating member generates heat itself for heating the heated body, and apart from the heated body, the heating member is located at a distance from a heater. A temperature measurement dummy member, which is heated together with the heated body by the heating member; a temperature measurement means put in contact directly with the temperature measurement dummy member for measuring the temperature of the contacted position at the temperature measurement dummy member; and a temperature information acquiring means for acquiring the temperature information, which was measured by the temperature measurement means, at the contacted position of the temperature measurement dummy member, as estimation temperature information of the heated body, are provided. COPYRIGHT: (C)2009,JPO&INPIT
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