| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealing ring mounting inspecting apparatus capable of non-contact detection of the forgetting of the sealing ring mounting or the duplicated mounting of the sealing ring to a ceramic board with high precision in an electronic component housing package. SOLUTION: In this sealing ring mounting inspecting apparatus, a table 2 on which the ceramic board 1 being mounted is installed on the top face of a base board 3 via a linear stage 2a and a rotary stage 2b which are so formed that they can be moved in a horizontal plane by a stepping motor 7. A CCD camera 4 connected to an image processing unit 8 for sending the image signal to a drive control unit 6 for controlling the operation of the stepping motor 7 and to an image display unit 9, and a laser displacement sensor 5 connected to a data processing unit 10 and an inspection result display unit 11 are mounted above the table 2. COPYRIGHT: (C)2009,JPO&INPIT
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