| 摘要 |
An actuator device includes a piezoelectric element configured to include a lower electrode provided on a surface side of a substrate, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer. The lower electrode contains a precious metal. When a cross-section of the lower electrode is examined in the thickness direction using secondary ion mass spectroscopy (SIMS) , a ratio Z<SUB>1 </SUB>/Z<SUB>2 </SUB>between the intensity Z<SUB>1 </SUB>of oxygen ions and the intensity Z<SUB>2 </SUB>of ions of a precious metal detected at the surface of the lower electrode facing the substrate is 0.2 or more.
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