| 摘要 |
<p>A nozzle having a photoresist sensing function is provided to prevent a tube from being bent to smoothly supply a photoresist by forming a photoresist sensing means in a nozzle body as maintaining a function of sensing a flow of the photoresist. A nozzle having a photoresist sensing function includes a nozzle body(100), a nozzle tip(200) and a photoresist sensing means(300). A flow path having an inlet and an outlet is formed in the nozzle body. The nozzle tip is engaged with the inlet or outlet of the flow path. The photoresist sensing means senses a photoresist flowing through the flow path penetrating the nozzle body to the passage. A hole(120) is formed to penetrate the nozzle body to the flow path. A reflection ultrasonic sensor is installed in the hole and senses the photoresist. Optical sensors sense inflow/outflow of the photoresist. Each of the optical sensors is divided into a light emitting sensor and a light receiving sensor.</p> |
