| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration actuator controlling a rotor to correctly move without causing displacement in a rotary shaft. <P>SOLUTION: An intermediate value f1 between a resonant frequency fy of a Y-axis direction and a resonant frequency fz of a Z-axis direction is set on an X-direction frequency setting section 161 of a driving circuit 16, an intermediate value f2 between a resonant frequency fx of an X-axis direction and a resonant frequency fz of a Z-axis direction is set on an Y-axis frequency setting section 162, and an intermediate value f3 between the resonant frequency fx of the X-axis direction and a resonant frequency fy of the Y-axis direction is set on an Z-axis frequency setting section 163. In rotating the rotor around an X-axis, an AC voltage of a driving frequency f1 is applied to first and second piezoelectric element portions 31, 32 from an X-axis driving section 164, in rotating the rotor around a Y-axis, an AC voltage of a driving frequency f2 is applied to second and third piezoelectric element portions 32, 33 from an Y-axis driving section 165, and in rotating the rotor around a Z-axis, an AC voltage of a driving frequency f3 is applied to the first and third piezoelectric element portions 31, 33 from an Z-axis driving section 166. <P>COPYRIGHT: (C)2009,JPO&INPIT |
