| 摘要 |
An XY table actuator that can be significantly reduced in size and enables a reduction in the height of a table, and this can be achieved despite the fact that the XY table actuator incorporates drive means for freely moving an object placed on the table in an XY plane and positioning it. The actuator has a stationary plate (2) having a receiving groove in the X-direction; a moving plate (5) having a receiving groove in the Y-direction; an intermediate plate (4) whose lower body is assembled via rolling bodies (3) into the receiving groove (20) of the stationary plate (2), whose upper body is assembled via the rolling bodies (3) into the receiving rove of the moving plate (5), and which is movable in the X-direction relative to the stationary plate and in the Y-direction relative to the moving plate; X drive means (6) for advancing the intermediate plate in the X-direction, relative to the stationary plate; and Y drive means (7) for advancing the intermediate plate in the Y-direction, relative to the moving plate. In the intermediate plate are provided receiving chambers (40, 41) for the X drive means and the Y drive means. |
