METHODS OF FILLING GAPS AND METHODS OF DEPOSITING MATERIALS USING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION,申请号KR20067005493-传众专利搜索

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发明名称	METHODS OF FILLING GAPS AND METHODS OF DEPOSITING MATERIALS USING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION
摘要
申请公布号	KR100759649(B1)	申请公布日期	2007.09.17
申请号	KR20067005493	申请日期	2006.03.20
申请人		发明人
分类号	H01L21/205;C23C16/04;C23C16/40;H01L21/316;H01L21/762;H01L21/768	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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