APPARATUS FOR TESTING THE ELECTRICAL PROPERTIES AND CONFIDENCE OF SEMICONDUCTOR

摘要

An apparatus for testing electrical characteristic and reliability of semiconductors is provided to reduce exchange frequency by performing inspection of DUTs using plural manipulators having a probe. An apparatus for testing electrical characteristic and reliability of semiconductors includes plural manipulators(110), probes(120), and phase control units. The manipulators are implemented corresponding to DUTs(Device Under Test). Each of the probes mounted on the manipulators includes a tip for detecting electrical characteristic and reliability of the DUTs. Each of the phase control units mounted on the manipulators adjusts movement of a corresponding probe on the DUTs.