| 摘要 |
<P>PROBLEM TO BE SOLVED: To form an alignment mark good by irradiating a laser beam to a first position with the power density and the irradiation time according to the intensity of the first position. <P>SOLUTION: In a beam irradiator, a processing object in which an amorphous silicon film is formed on a ground member is prepared. The intensity of the first position of the amorphous silicon film is detected. The alignment mark is formed by irradiating a laser beam 11 to the first position with the power density and the irradiation time according to the detected intensity of the first position. <P>COPYRIGHT: (C)2008,JPO&INPIT |
