| 摘要 |
A flatness adjusting assembly, an electrical inspection device, and a flatness adjusting method are provided to easily adjust a flatness of a substrate, which is contacted with a DUT, by controlling a non-elastic coupling between the substrate and the DUT. A flatness adjusting assembly for an electrical inspection device includes a coupling unit(20) and an adjusting unit(22). The coupling unit couples first and second substrates(10,12) with each other. The first substrate has a first surface, which is contacted with a DUT(Device Under Test). The second substrate is arranged to face a second surface of the first substrate, which is opposed to the first substrate. The adjusting unit is elastically coupled with the coupling unit and adjusts a flatness of the first substrate by adjusting the non-elastic coupling between the adjusting unit and the first substrate. |
