LIQUID SUSPENSION AND POWDER OF CERIUM OXIDE PARTICLES, METHODS FOR MAKING THE SAME AND USES THEREOF IN POLISHING

摘要

The invention relates to a suspension of cerium oxide particles in which the particles (secondary particles) have an average size not exceeding 200 nm, said secondary particles being comprised of primary particles having an average size not exceeding 100 nm with a standard deviation having a value not exceeding 30 % of the value of said average size. This suspension is prepared from a solution of a cerium-III salt, comprising cerium IV or hydrogen peroxide, which is brought into contact with a base in the presence of nitrate ions and in an inert atmosphere. The medium thus obtained is submitted to a thermal processing in an inert atmosphere, then acidified and scrubbed. The powder is obtained by drying and calcining of the suspension. The suspension and the powder can be used for polishing.