| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist agent coater which can eliminate a contact transfer nonunifomity and drying nonunifomity caused by contacting a back face of a board with the other members. SOLUTION: The resist agent coater includes a table coater, a vacuum drier and a baking device 16. The baking device 16 includes: a hot plate 44 provided on a base inside a heating region; a first support pin 48 configured to move vertically, for supporting the board detachably at the same position with a portion supported by a vacuum drier unit; and a lift pin 43 configured to advance or retreat with respect to the hot plate, for supporting the board. The board brought into the heating region is held by the first support pin to heat it, and then the first support pin is dropped to move the board onto the lift pin 43 to heat it in a state close to the hot plate 44. Thereafter, the board is placed on the hot plate 44 to heat it, thereby performing a baking processing. COPYRIGHT: (C)2008,JPO&INPIT
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