| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laminating apparatus for acquiring a higher degree of vacuum of the laminating part by suppressing warpage due to the temperature of the upper chamber and the lower chamber at the laminating part. <P>SOLUTION: A structure, where an upper chamber of the laminating part is placed in close contact with the upper part of the lower chamber by lifting up the upper chamber with a lift, is constituted. Rather than have the lift and the upper chamber coupled directly and a buffer part is made to interpose to transmit the lifting force of the lift, to the upper chamber by buffering the lifting force. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
