| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor-manufacturing carrying device that quickly and definitely carries a work even in a narrow environment where work stocks and the like are brought out at their dispatching location and devices are brought-in at their carrying destination. <P>SOLUTION: The device is provided with a body section 2 that accommodates a drive section, a first arm 3, a second arm 4, and a third arm 5 that are rotatably attached in the horizontal direction with rotational centers 30, 40, 50 as the centers, a hand section 6 having nails 62, 63 where suction inlets 64, 65 for suctioning works are disposed, and a sliding section that supports a hand section rear end 61 inside an opening 51, and the works inserted into a shelf of the work stock are taken in and out. In addition, a work detecting sensor 52 is provided to detect whether or not there is a work left when the hand section 6 goes back to the third arm 5. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
