| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a stage equipped with a function for suppressing vibration due to mechanical resonance by using an attribute feedback control means for suppressing a yawing angle in performing the uniform motion of a bridge member. <P>SOLUTION: This stage is provided with a master axial linear motor and a slave axial linear motor arranged in parallel so as to be separated by a predetermined distance; a master slider and a slave slider configured to slide to the axial direction of those linear motors so as to be position-controlled; a bridge member configured to connect those sliders so as to be movement-controlled in the coaxial direction of the axial direction; and an attitude feedback control means for detecting and suppressing the angle of rotation with respect to the axis of the height direction of the bridge member. This stage is provided with a pair of acceleration sensors mounted in the neighborhood of the connection part of the master slider and the slave slider on the bridge member and an angle feedback means for integrating the difference value of the detection values of those pair of acceleration sensors, and for inputting the calculated angle signal. <P>COPYRIGHT: (C)2008,JPO&INPIT |
