| 摘要 |
PROBLEM TO BE SOLVED: To uniformalize particle size of a columnar magnetic particles in the entire film thickness direction of a perpendicular magnetic recording layer in granular structure of the perpendicular recording layer. SOLUTION: In a manufacturing method of a magnetic recording medium, a first granular film having an easy magnetization axis in the vertical direction of a substrate is formed on the substrate using a first compound target of a metal magnetic phase and an oxide phase including the oxide phase in a first content ratio. When the first granular film reaches a prescribed film thickness, a second granular film is formed successively on the first granular film using a second compound target of the metal magnetic phase and the oxide magnetic phase including the oxide phase in the second content ratio being smaller than the first content ratio instead of the first compound target. Thereby, the magnetic recording layer constituted of a plurality of columnar magnetic particles whose sizes are uniform in the film thickness direction and the oxide film surrounding this is formed on the substrate. COPYRIGHT: (C)2008,JPO&INPIT
|
