PIEZOELECTRIC VIBRATOR AND MANUFACTURING METHOD THEREOF, AND PIEZOELECTRIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrator, where the cross section of a side serface 211 of a piezoelectric vibrator 20 is formed in a well defined rectangular shape.

SOLUTION: The method for manufacturing the piezoelectric vibrator 20 has: a process S10 for preparing a flat piezoelectric material 10 having etching anisotropy in a prescribed direction; a process S18 for performing wet etching to the piezoelectric material to form the piezoelectric vibrator in the piezoelectric material; and a process S20 for applying laser beams to the side section of the piezoelectric vibrator subjected to wet etching for partially removing the side section.

COPYRIGHT: (C)2008,JPO&INPIT