| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for an electro-optical device which can restrain the quantity of charges which charges a substrate, in wet processing for a sheet-type substrate processing device. <P>SOLUTION: In the manufacturing method for an electro-optical device, a substrate for the electro-optical device is rotated about a vertical axis, and a plurality of processing liquids are fed sequentially to one side of the substrate to process the substrate, and then the processing liquids scattering from the substrate are recovered by a processing liquid recovering means which is constituted of a plurality of processing liquid guidance parts vertically arranged in a multistage manner, the parts being circular and open toward the substrate side. Further, the plurality of processing liquids are recovered, only by the processing liquid-guiding part which is provided at the uppermost part of the processing liquid-recovering means, and then a plurality of processing liquid recovering routes, which communicate with the processing liquid guidance parts, are changed by means of a route-changing means according to the plurality of recovered processing liquids, so as to separate the plurality of recovered processing liquids by kinds. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
