| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wafer holding device which holds a wafer afloat at an exact position without damaging the wafer. <P>SOLUTION: The wafer holding device includes a holding member 2 which holds the wafer in an afloat position on a suction face 2a, centering mechanisms 3 which are arranged at given intervals at the outer periphery of the holding member 2 and can advance and retreat parallel with the suction face 2a, wafer guides 4 which are disposed on the centering mechanisms 3 and oppose the outer peripheral face of the wafer, and buffering members 5 which are disposed on the wafer guides 4 and bent in the direction of the radius of the wafer when coming in contact with the outer peripheral face of the wafer. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
