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发明名称
Single Electron Device Fabrication method thereof
摘要
申请公布号
KR100830203(B1)
申请公布日期
2008.05.16
申请号
KR20020001939
申请日期
2002.01.10
申请人
发明人
分类号
H01L29/775
主分类号
H01L29/775
代理机构
代理人
主权项
地址
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