| 摘要 |
PROBLEM TO BE SOLVED: To provide processing equipment capable of reducing the floating surface area of local exhaust device, and to provide a manufacturing device of a wiring substrate provided with the processing equipment. SOLUTION: For the configuration of the processing equipment, the local exhaust device 4 can relatively surface from a support base 2 by the injection of a gas for surfacing to the support base 2, and the gas for surfacing is injected through a restrictor ventilation means 13 provided inside the local exhaust device 4. COPYRIGHT: (C)2008,JPO&INPIT
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