| 摘要 |
A system and a method for generating ions and radicals are provided to generate the ions and radicals having low energy, which is used in a dynamic process and a static process. A system for generating ions includes an external electrode, an internal electrode, and a gas inlet(185). The external electrode has a discharge chamber(180). The internal electrode is positioned in an inside of the discharge chamber. The internal electrode forms an upper part(190) of the discharge chamber and a lower part(195) of the discharge chamber. The gas inlet is positioned in the lower part of the discharge chamber. Plasma formed in the lower part of the discharge chamber provides priming particles which are used to form the plasma in the upper part of the discharge chamber.
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