| 摘要 |
<p>A substrate holding apparatus is provided to enhance productivity and to increase a yield by preventing generation of a wave pattern in a cell part. A pin includes one end thereof in order to support a substrate. A plate is formed to support the other end of the pin. A moving unit moves the pin. The moving unit includes a magnetic material(210) having the pin and an external member(220) of the pin for surrounding the magnetic material. The magnetic material has a rectangular shape. An upper surface of the plate is composed of a corrosion-resistant member. A lower surface of the plate is composed of a magnetic member.</p> |
