发明名称 Method of fabricating organic thin film transistor using self assembled monolayer-forming compound containing dichlorophosphoryl group
摘要 Disclosed is a method of fabricating an organic thin film transistor including a substrate, a gate electrode, a gate insulating layer, metal oxide source/drain electrodes, and an organic semiconductor layer, in which the surface of the metal oxide source/drain electrodes or of the metal oxide source/drain electrodes and gate insulating layer is treated with a self assembled monolayer-forming compound containing a dichlorophosphoryl group. According to the method of example embodiments, the work function of the metal oxide of the source/drain electrodes may be increased to be higher than that with no SAM-forming electrode, thus making it possible to fabricate an improved organic thin film transistor having increased charge mobility.
申请公布号 US2008105866(A1) 申请公布日期 2008.05.08
申请号 US20070802657 申请日期 2007.05.24
申请人 SAMSUNG ELECTRONICS CO., LTD 发明人 JEONG EUN JEONG;HAHN JUNG SEOK;PARK JEONG IL;LEE SANG YOON
分类号 H01L51/40;C07D333/02;C07F9/08;H01L29/08 主分类号 H01L51/40
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