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发明名称
Flow rate control with a positive displacement liquid pump
摘要
申请公布号
EP1106826(B1)
申请公布日期
2008.05.07
申请号
EP20000126636
申请日期
2000.12.04
申请人
EBARA CORPORATION
发明人
HORIE, KUNIAKI;TSUKAMOTO, KIWAMU;KAMODA, KENJI;YAMAGISHI, HIROTAKE;UEMURA, SHINYA
分类号
F04B49/00;F04B13/00;F04B43/02;F04B43/08;F04B49/08;H01L21/316;H01L21/205;H01L21/31
主分类号
F04B49/00
代理机构
代理人
主权项
地址
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