发明名称 SYSTEM AND METHOD FOR MEASURING A CARRIER TYPE OF A SEMICONDUCTOR NANO-MATERIAL
摘要 A system and a method for measuring a carrier type of a semiconductor nano-material are provided to improve the reliability of measurement by employing a measuring member for detecting a Seeback voltage generated by the gradient of temperature. A pair of micro heaters(110,120) are contacted to a semiconductor nano-material and heated by different temperatures to for a temperature gradient in the semiconductor nano-material. A measuring member detects a Seeback voltage generated by the temperature gradient of the semiconductor nano-material. The measuring member includes a pair of probes(130,140) and a voltmeter(150). The pair of probes are electrically connected to the semiconductor nano-material. The voltmeter is coupled to the pair of probes. The semiconductor nano-material includes a semiconductor nano-wire or a semiconductor tube.
申请公布号 KR100827819(B1) 申请公布日期 2008.05.07
申请号 KR20070017518 申请日期 2007.02.21
申请人 INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY 发明人 LEE, SANG KWON;KIM, TAE HONG;LEE, SEUNG YONG
分类号 H01L21/66 主分类号 H01L21/66
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