发明名称 |
SYSTEM AND METHOD FOR MEASURING A CARRIER TYPE OF A SEMICONDUCTOR NANO-MATERIAL |
摘要 |
A system and a method for measuring a carrier type of a semiconductor nano-material are provided to improve the reliability of measurement by employing a measuring member for detecting a Seeback voltage generated by the gradient of temperature. A pair of micro heaters(110,120) are contacted to a semiconductor nano-material and heated by different temperatures to for a temperature gradient in the semiconductor nano-material. A measuring member detects a Seeback voltage generated by the temperature gradient of the semiconductor nano-material. The measuring member includes a pair of probes(130,140) and a voltmeter(150). The pair of probes are electrically connected to the semiconductor nano-material. The voltmeter is coupled to the pair of probes. The semiconductor nano-material includes a semiconductor nano-wire or a semiconductor tube.
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申请公布号 |
KR100827819(B1) |
申请公布日期 |
2008.05.07 |
申请号 |
KR20070017518 |
申请日期 |
2007.02.21 |
申请人 |
INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY |
发明人 |
LEE, SANG KWON;KIM, TAE HONG;LEE, SEUNG YONG |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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