| 摘要 |
PROBLEM TO BE SOLVED: To provide a shock absorber for pellicle packing and a packing method using the same which protects a pellicle and a pellicle case from a shock or an impact applied to a transport container during the transportation of the pellicle and safely transports the pellicle maintaining the pellicle in a clean state by preventing the generation of dust from a component of the case or the container. SOLUTION: In this shock absorber 1 for pellicle packing, the surface of the shock absorber 1 contacting with a pellicle case 3 arranged on the bottom face of the case 3 in a pellicle transport container 6 has an uneven face 2. By packing the pellicle using the absorber 1, a shock absorbing effect is improved compared with a conventionally used flat panel-like shock absorber. Thus, a shock or an impact during transportation is reduced and the pellicle is kept and transported in a clean state without causing the deposition of a foreign matter and contamination. COPYRIGHT: (C)2008,JPO&INPIT
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