| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor element simple in constitution, and easy in manufacturing. SOLUTION: The pressure sensor element 10 is provided with an insulation substrate 11, a wire conductor 12 of copper laid down on the insulation substrate 11, and the like. The wire conductor 12 is laid down while meandering on the insulating substrate 11. On the rear surface of the insulating substrate 11, the ground plate 14 of copper etc., is bonded. On the insulating substrate 11, a medium 16 forming the conductor periphery medium to the wire conductor 12 is bonded. The medium 16 is constituted of a base material 17 of dielectric elastic resign or elastomer, and the minute coiled carbon dispersed in the base material 17 and fibers 18. COPYRIGHT: (C)2008,JPO&INPIT
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