发明名称 |
Methods of forming integrated circuit devices having carbon nanotube electrodes therein |
摘要 |
An integrated circuit capacitor includes first and second electrodes and at least one dielectric layer extending between the first and second electrodes. The first electrode includes at least one carbon nanotube. The capacitor further includes an electrically conductive catalyst material. This catalyst material may be selected from the group consisting of iron, nickel and cobalt and alloys thereof.
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申请公布号 |
US7354823(B2) |
申请公布日期 |
2008.04.08 |
申请号 |
US20050205253 |
申请日期 |
2005.08.16 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHOI YOUNG-MOON;YEO IN-SEOK;LEE SUN-WOO |
分类号 |
H01L21/8242 |
主分类号 |
H01L21/8242 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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