| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a reference plate for calibrating flatness measuring device capable of calibrating the measurement region when measuring the flatness of a substrate surface with the flatness measuring device, and accurately evaluating the actual region of the flatness measuring device. <P>SOLUTION: The reference plate 20 for calibrating the flatness measuring device acquires height information from a certain reference level in a substrate surface with the flatness measuring device, and calibrates a measurement region when measuring the flatness of the substrate surface. It has boundary lines 31-34a, 34b which form a plurality of square or circular regions with level differences to the plate 1 surface on a plate 1. The reference plate 20 has a pattern of the boundary lines made of metallic thin films formed on the glass plate (plate 1) surface. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
