| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily find an illumination angle with high accuracy for detecting an image having a high contrast by diffracted light so as to detect the image of a defect in a periodical pattern of an inspection object, and to suppress variation in detection accuracy among workers. <P>SOLUTION: The method for setting an illumination angle in a defect inspection instrument includes: a step for measuring diffracted light produced by irradiating an inspection object with approximately parallel light from a light source at a plurality of angles and acquiring intensity of diffracted light at each illumination angle; a step of accumulating the data of diffracted light intensity at each illumination angle; a for calculating the evaluated value of a defect evaluating easiness of observing a defect at each illumination angle by using the data of diffracted light intensity at each illumination angle; and a step for setting an illumination angle having the maximum evaluated value of the defect. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
