| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten the time required for an exposure stage by controlling exposure position correction and timing of irradiation with exposure light without forming a two-dimensional image based upon a linear image. <P>SOLUTION: An exposure device includes a first imaging means 4 having a plurality of light receiving elements arrayed almost orthogonally to a conveyance direction, a second imaging means 5 having a plurality of light receiving elements arrayed almost in parallel to the conveyance direction, an alignment means 6 of moving a photomask 12 almost orthogonally to the conveying direction to correct a position of exposure by the photomask 12, and a control means 8 of controlling driving of the alignment means 6 based upon a first reference position for exposure position correction of a color filter substrate 9 when the first imaging means 4 detects the first reference position, and controlling the timing of irradiation with the exposure light based upon a second reference position for irradiation timing extraction of the exposure light of the color filter substrate 9 when the second imaging means detects the second reference position. <P>COPYRIGHT: (C)2008,JPO&INPIT |
