ANNEALING APPARATUS

摘要

Provided is an annealing apparatus including an annealing chamber in which plate-shaped members to be processed are accommodated, a support frame for horizontally aligning and vertically stacking the plate-shaped members in the annealing chamber in a multi-stage manner, and a hot air unit for supplying hot air to the support frame divided into a plurality of sections in a vertical direction to treat the plate-shaped members using the hot air. Since the plurality of plate-shaped members to be processed can be annealed with minimal temperature deviation, it is possible to increase annealing uniformity of the plate-shaped members and improve throughput and yield.