| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface projecting part detection device and a surface projecting part detection method for detecting fine projecting parts on the object surface. SOLUTION: The surface projecting part detection device comprises a flexible sheet-shaped inclusion part in contact with the object surface; a force detection part in contact with the other surface opposite to one surface in contact with the object of the sheet-shaped inclusion part, detecting the total sum of quantities approximately proportional to an applied pressure; and a pressing means pressing the force detection part and the sheet-shaped inclusion part onto the object surface with an approximately constant force. The sheet-shaped inclusion part has a high elastic modulus at a portion near the surface in contact with the object surface, and a low elastic modulus at a portion near the surface in contact with the force detection part. The surface projecting part detection method relatively moves the surface projecting part detection device and the object with the surface projecting part detection device abutting on the object surface. COPYRIGHT: (C)2008,JPO&INPIT
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