| 摘要 |
On a probe card supporting plate having a same area as that of the conventional one, guide holes are formed with a narrower pitch compared with the conventional one, a degree of freedom in selecting an elastic member for urging the probe pin is improved, and inspection of highly integrated devices is accurately performed. The probe card is provided with a circuit board, and the supporting plate arranged below the circuit board for supporting the probe pin. The probe pin having an elastic section and a pin section is inserted into a guide hole formed on the supporting plate, and the leading edge of the pin section protrudes downward from the supporting plate. The guide hole has a square horizontal cross-section shape. ® KIPO & WIPO 2008 |
