| 摘要 |
<p>A vacuum valve is provided to press closure plates to a corresponding valve sheet by using differential pressure in a forming process. A valve housing(1) includes an internal space(2) for forming a vacuum region of a vacuum valve, and a first and second openings(5,6) having parallel longitudinal axes(7,8) surrounded by a first and second valve seats(11,12). A closure member(13) includes a first and second closure plates(14,15). A transverse drive unit adjusts the closure member in an actuation direction transverse to the parallel longitudinal axes of the valve openings between an open position and an intermediate position. In the open position, the closure plates releases the valve openings. In the intermediate position, the closure plates cover the valve openings. A first longitudinal drive unit(21) adjusts the closure member between the intermediate position and a first closed position. In the first position, the first closure plate is pressed against the first valve seat. A second longitudinal drive unit(22) adjusts the closure member between the intermediate position and a second closed position. In the second closed position, the second closure plate is pressed against the second valve seat. Each of the first and second longitudinal drive units includes a plurality of actuating elements(25,26). The actuating elements are guided into the vacuum region of the valve housing through vacuum feed-throughs. The actuating elements have actuating ends inside the vacuum region. The actuating elements are adjusted by using driving elements(23,24). The driving elements are located outside the vacuum region of the valve housing.</p> |
