NONVOLATILE MEMORY STRUCTURE AND METHOD FOR FORMING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a nonvolatile memory structure and a method for forming the same. SOLUTION: This nonvolatile memory structure comprises a plurality of charge storage patterns. An electric coupling distance Lc between adjacent charge storage patterns is formed larger than a linear geometry distance Ls between the adjacent charge storage patterns. COPYRIGHT: (C)2008,JPO&INPIT