发明名称 Solar cell manufacturing method, involves providing semiconductor substrate with pn-junction formed in it and removing dielectric layer in local areas by ultra short pulse laser with laser pulse duration of less than hundred picoseconds
摘要 <p>The method involves providing a semiconductor substrate with a pn-junction formed in it. The dielectric layer is removed in local areas by an ultra short pulse laser with a laser pulse duration of less than 100 picoseconds, particularly less than 50 picoseconds and stronger prefers less than 20 picoseconds.</p>
申请公布号 DE102007011749(A1) 申请公布日期 2008.03.13
申请号 DE20071011749 申请日期 2007.03.10
申请人 INSTITUT FUER SOLARENERGIEFORSCHUNG GMBH 发明人 ENGELHART, PETER;GRISCHKE, RAINER;NEUBERT, TOBIAS
分类号 H01L31/18;H01L21/3105;H01L31/0216;H01L31/04 主分类号 H01L31/18
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