发明名称 |
Solar cell manufacturing method, involves providing semiconductor substrate with pn-junction formed in it and removing dielectric layer in local areas by ultra short pulse laser with laser pulse duration of less than hundred picoseconds |
摘要 |
<p>The method involves providing a semiconductor substrate with a pn-junction formed in it. The dielectric layer is removed in local areas by an ultra short pulse laser with a laser pulse duration of less than 100 picoseconds, particularly less than 50 picoseconds and stronger prefers less than 20 picoseconds.</p> |
申请公布号 |
DE102007011749(A1) |
申请公布日期 |
2008.03.13 |
申请号 |
DE20071011749 |
申请日期 |
2007.03.10 |
申请人 |
INSTITUT FUER SOLARENERGIEFORSCHUNG GMBH |
发明人 |
ENGELHART, PETER;GRISCHKE, RAINER;NEUBERT, TOBIAS |
分类号 |
H01L31/18;H01L21/3105;H01L31/0216;H01L31/04 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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