Method of selective etch by using hard mask and method of forming isolation of memory device by using the same,申请号KR20060084390-传众专利搜索

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发明名称	Method of selective etch by using hard mask and method of forming isolation of memory device by using the same
摘要
申请公布号	KR100811266(B1)	申请公布日期	2008.03.07
申请号	KR20060084390	申请日期	2006.09.01
申请人		发明人
分类号	H01L21/76;H01L21/302	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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